Introduction
The course will provide basic information about Ultrasound and Terahertz imaging. Following, MEMS technology for transducers development will be introduced. Microfabricated devices for both imaging techniques will be presented. Equivalent electrical modeling and finite element modeling approaches for the investigation of MEMS devices for US and THz imaging will be discussed.
Course plan
- Introduction
to biomedical imaging techniques
- Biomedical imaging
- Ultrasound imaging
- Terahertz imaging
- MEMS technology for
biomedical imaging applications
- Micro-Electro-Mechanical Systems (MEMS)
- MEMS technology
- MEMS resonators
- MEMS
devices for ultrasound imaging of tissues
- CMUTs
- CMUT fabrication
- CMUT characterization
- Circuital
modeling of microfabricated acoustic transducers
- 1-D CMUT linear model
- CMUT lumped-parameter equivalent electrical circuit
- FEM
modeling of microfabricated acoustic transducers: electro-mechano-acoustic
coupling
- Finite element analysis of CMUTs
- MEMS
devices for Terahertz imaging of tissues
- MEMS bolometers
- FEM
modeling of microbolometers: thermo-opto-mechanical coupling
- Finite element analysis of a THz MEMS bolometer
- Teacher: Monica La Mura