The course will present the basic principle of spectroscopic ellipsometry. The first part will include
a theoretical background on the technique (polarization of light, interaction of light and materials,
optical constants) and the fundamentals of ellipsometry data analysis, with examples of
applications to different types of thin films. In the second part, the students will participate in a
practical activity where they will perform measurement and data analysis with the instrument
installed at the Department of Industrial Engineering.
8 hours